SFT-D Pnuematic Series

Description

Product Model:

SFT180D Vibration Damping

SFT130D Vibration Damping

SFT100F Vibration Damping

SFT080D Vibration Damping

SFT060D Vibration Damping

SFT040D Vibration Damping

Introduction:

The SFT series of shock-resistant active vibration isolators use pneumatic isolators as the main support in the vertical direction. In the horizontal direction, they employ a mechanical inverted pendulum negative stiffness mechanism in parallel with a positive stifiness mechanism. Combined with active vibration control and precise positioning control in both the vertical and horizontal directions, the system achieves high-performance active vibration isolation and stabilization across six degrees of freedom. This design meets the high-performance vibration isolation and shock resistance stability requirements for a wide range of equipment used in back-end packaging, semiconductor inspection and metrology applications.

Features:

● Pneumatic Air Sping as Main Support

● Active Vibration Control and Precision Positioning Control

● High-Performance Vibration lsolation and Impact Resistance

● Mechanical Inverted Pendulum Negative Stiffness Mechanism in Parallel with Positive Stiffness

● Meets High-Performance Vibration lsolation and Shock Resistance Stability Requirements

● Application Fields: Back-End Packaging. Semiconductor inspection, Metrology, Etc

Specifications:

Model	SFT180D	SFT130D	SFT100F
Max Load Capacity With 4 Isolators	4500~7200 kg	3500~5200 kg	2500~4000kg
Isolator Dimensions	380*370*260（L*W*H mm）	290*290*259（L*W*H mm）	260*260*259（L*W*H mm）
Isolator Weight	≤86kg	≤67kg	≤45kg
Transmissibility	≤-3dB@2Hz，≤-12B@5Hz，≤-25dB@10Hz	≤-3dB@2Hz，≤-12B@5Hz，≤-25dB@10Hz	≤-12dB@1Hz，≤-15dB@5Hz，≤-25dB@10Hz
Horizontal Actuator Force per Isolator	640N	640N	320N
Max System Power	1500W	1500W	700W
Vertical Actuator Force per Isolator	320N
Passive Element	Pneumatic Air Sping
Degrees of Freedom	6
Active Isolation Range	0.8 ~ 150Hz
Position Stability	≤±8μm

Model	SFT080D	SFT060D	SFT040D
Max Load Capacity With 4 Isolators	2400~3200 kg	1600~2400 kg	1000~1600 kg
Isolator Dimensions	308*300*202（L*W*H mm）	308*300*202（L*W*H mm）	308*300*202（L*W*H mm）
Isolator Weight	≤49kg	≤49kg	≤47kg
Passive Element	Pneumatic Air Sping
Degrees of Freedom	6
Active Isolation Range	0.8 ~ 150Hz
Transmissibility	≤-3dB@2Hz，≤-12B@5Hz，≤-25dB@10Hz
Position Stability	≤±8μm
Horizontal Actuator Force per Isolator	640N
Vertical Actuator Force per Isolator	320N
Max System Power	1500W